This project is about the vibration suppression of different micro-beams with different boundary conditions. Micro-beams are used in Atomic force microscopy (AFM) to scan the material’s surface, which is a very high-resolution scanning, and a small vibration decreases its precision dramatically.

We try in this project to model the piezoelectric actuators and sensors’ effects on the system and design a controller that can eliminate the vibrations of the whole system for all modes together. We verify our designed controller and mathematical model numerically and experimentally.